JPS6140438Y2 - - Google Patents
Info
- Publication number
- JPS6140438Y2 JPS6140438Y2 JP12740183U JP12740183U JPS6140438Y2 JP S6140438 Y2 JPS6140438 Y2 JP S6140438Y2 JP 12740183 U JP12740183 U JP 12740183U JP 12740183 U JP12740183 U JP 12740183U JP S6140438 Y2 JPS6140438 Y2 JP S6140438Y2
- Authority
- JP
- Japan
- Prior art keywords
- elastic support
- support members
- plane
- substrate
- plane moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007246 mechanism Effects 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 7
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
Landscapes
- Machine Tool Units (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12740183U JPS6036132U (ja) | 1983-08-18 | 1983-08-18 | Ｘｙ平面移動機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12740183U JPS6036132U (ja) | 1983-08-18 | 1983-08-18 | Ｘｙ平面移動機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6036132U JPS6036132U (ja) | 1985-03-12 |
| JPS6140438Y2 true JPS6140438Y2 (en]) | 1986-11-18 |
Family
ID=30289365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12740183U Granted JPS6036132U (ja) | 1983-08-18 | 1983-08-18 | Ｘｙ平面移動機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6036132U (en]) |
-
1983
- 1983-08-18 JP JP12740183U patent/JPS6036132U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6036132U (ja) | 1985-03-12 |
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